Doped Polysilicon LPCVD
Features and Benefits
Unmatched safety
Room Temperature Operation
Conversion of Hazardous Gases into Stable Salts
Outlet Concentrations below TLV:
AsH3 < 0.05 ppm, PH3 < 0.3 ppm, SiH4 < 5 ppm
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)
Room Temperature Operation
Conversion of Hazardous Gases into Stable Salts
Outlet Concentrations below TLV:
AsH3 < 0.05 ppm, PH3 < 0.3 ppm, SiH4 < 5 ppm
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)
