Ion Implantation
In-situ removal of AsH3, PH3, BF3 by-products before or after ion source pump, directly within implanter housing with stand-alone CLEANSORB CS015SA Dry Scrubber.
The ion source-, and target chamber exhaust of 5 ion implanters combined into one CLEANSORB BX High-Flow System. Including integrated blower and electrochemical gas sensor.
Typical absorbing lifetime of column: 2 years
Typical absorbing lifetime of column: 2 years
Features and Benefits
No handling of toxic waste by user
Room temperature conversion of hazardous gases into stable salts
Suitable for operation at negative pressure
Outlet Concentrations below TLV:
AsH3 < 0.05 ppm, PH3 < 0.3 ppm, BF3 < 1 ppm
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)
Room temperature conversion of hazardous gases into stable salts
Suitable for operation at negative pressure
Outlet Concentrations below TLV:
AsH3 < 0.05 ppm, PH3 < 0.3 ppm, BF3 < 1 ppm
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)