Two chambers hooked up to CLEANSORB SC System
The waste gas from metal etchers contains a high level of aluminium chloride solids. CLEANSORB columns on this application are usually fitted with a specially-designed labyrinth to trap condensibles at its inlet. There is no back-pressure to the pump over the entire column lifetime.
Metal Etch
Features and Benefits
Unmatched safety
Room Temperature Operation
No Pressure Drop over Column Lifetime
Integrated Inlet Heating and Electrochemical gas sensor
Conversion of Hazardous Gases into Stable Salts
Dry scrubbing to below TLV concentrations:
Cl2 < 1 ppm, BCl3 < 1 ppm, CF4 < 3 ppm (HF)
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)
Room Temperature Operation
No Pressure Drop over Column Lifetime
Integrated Inlet Heating and Electrochemical gas sensor
Conversion of Hazardous Gases into Stable Salts
Dry scrubbing to below TLV concentrations:
Cl2 < 1 ppm, BCl3 < 1 ppm, CF4 < 3 ppm (HF)
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)