MOVPE is by far the most critical challenge in terms of exhaust gas management. The combination of liter per minute-range flows of AsH3 and PH3, the predominance of hydrogen, as well as the heavy deposition of pyrophoric white phosphorous in the effluent lines is unsurpassed by any other process used in silicon or compound semiconductor fabs

The special challenge posed by the MOVPE application is reflected in several unique features in CS CLEAN SYSTEMS' "CLEANSORB" dry bed absorber product line:
All gas connections within air-extracted cabinet
All pipework stainless steel
System functional during power failure
Endpoint gas detector
IR array temperature monitor
Re-oxidation (passivation) of absorber column
Bypass-miniabsorber
Automatic bypass valve
Forced N2 column cooling on overheating
Process-isolating inlet / outlet valves