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Nitride LPCVD Furnace
Nitride deposits are most detrimental to pump lifetime. As seen in the schematic, the nitride exhaust is fitted with a water-cooled pre-pump trap.
Nitride LPCVD
Features and Benefits
Unmatched safety
Room Temperature Operation: No creation of nitrous oxide (NOx) pollutants
Ideal for use with BTBAS and other MO precursors
Conversion of Hazardous Gases into Stable Salts
Outlet Concentrations below TLV:
NH3 < 25 ppm
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)