Abatement Package for Removal of PFCs
Removal of PFCs and HAPs from an oxide etch process by a CLEANSORB Dry Bed Absorber combined with “PCS PIRANHA” Pre-Pump Plasma Conversion System.
Oxide/Nitride Etch
Features and Benefits
Unmatched safety
Removal of global-warming greenhouse gases
High-capacity CLEANSORB chemisorber, optimised for Fluorine chemistry
No Pressure Drop over Column Lifetime
Conversion of Hazardous Gases into Stable Salts
Outlet Concentrations below TLV:
Dissociates (>99%) unused PFCs into reactive HAP by-products
F2 < 1 ppm, HF < 3 ppm
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)
Removal of global-warming greenhouse gases
High-capacity CLEANSORB chemisorber, optimised for Fluorine chemistry
No Pressure Drop over Column Lifetime
Conversion of Hazardous Gases into Stable Salts
Outlet Concentrations below TLV:
Dissociates (>99%) unused PFCs into reactive HAP by-products
F2 < 1 ppm, HF < 3 ppm
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)