Poly Etch
Up to four chambers hooked up to CLEANSORB Dual Column System
Features and Benefits
No bromide emissions to waste water
Worldwide column refilling and waste disposal service
Dedicated CLEANSORB dry scrubbing medium for bromide chemistry
No Pressure Drop over Column Lifetime
Conversion of Hazardous Gases into Stable Salts
Outlet Concentrations below TLV:
Cl2 < 1 ppm, SF6 < 3 ppm (as HF), HBr < 5 ppm
No flames, no heating, no waste water
Worldwide column refilling and waste disposal service
Dedicated CLEANSORB dry scrubbing medium for bromide chemistry
No Pressure Drop over Column Lifetime
Conversion of Hazardous Gases into Stable Salts
Outlet Concentrations below TLV:
Cl2 < 1 ppm, SF6 < 3 ppm (as HF), HBr < 5 ppm
No flames, no heating, no waste water