
TiN CVD

Features and Benefits
Unmatched safety
Room Temperature Operation
Conversion of Hazardous Gases into Stable Salts
Outlet Concentrations below TLV:
TDMAT < 25ppm (NH3), NH3 < 25ppm
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)
Room Temperature Operation
Conversion of Hazardous Gases into Stable Salts
Outlet Concentrations below TLV:
TDMAT < 25ppm (NH3), NH3 < 25ppm
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)

