Hydrolysis-Sensitive Process Recipes: Tungsten and Tungsten Silicide CVD
WSix CVD is generally regarded as a very „heavy duty“ application. Common materials used such as WF6 and DCS cause severe clogging problems upon contact with air/ moisture. Under the dry CLEANSORB conditions, zero pressure increase is observed.
W/WSix CVD
Features and Benefits
Unmatched safety
Room Temperature Operation
No back-Pressure to Process
No Clogging, Maintenance free
Long column lifetimes
Conversion of Hazardous Gases into Stable Salts
Outlet Concentrations below TLV:
WF6 < 3 ppm, SiH4 < 5 ppm, SiH2Cl2 < 5 ppm
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)
Room Temperature Operation
No back-Pressure to Process
No Clogging, Maintenance free
Long column lifetimes
Conversion of Hazardous Gases into Stable Salts
Outlet Concentrations below TLV:
WF6 < 3 ppm, SiH4 < 5 ppm, SiH2Cl2 < 5 ppm
Passive Operating Principle Eliminates Facilities Consumption (Electricity, Fuel, Water)