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DISCOVER THE ADVANTAGES...
With more than 20 years of experience serving the semiconductor industry, CS CLEAN SYSTEMS is your reliable partner for exhaust gas abatement, with a primary focus on dry bed absorption. More than 3,000 installations worldwide testify to customer confidence in CS CLEAN SYSTEMS' unique products and services.

We continue to extend our competence to support developing markets such as the solar industry and photovoltaics as well as MEMS.

Our product portfolio also includes a revolutionary dispensing system for advanced liquid precursors. The key elements which guarantee safety, reliability and ease of handling have been purpose-designed to meet the demands of tomorrow's advanced materials.

CS CLEAN SYSTEMS is a truly global company with research and development, manufacturing and marketing located in dedicated centers of competence located throughout Europe, Japan, USA, and the Far East.



CLEANSORB Dry Bed Absorbers




New Orders received for Oxford Plasma Technologies RIE and PECVD Systems
Ismaning, October 2009

CS CLEAN SYSTEMS is pleased to announce a new round of orders for its CLEANSORB dry bed abatement systems. The latest systems are scheduled for shipping to research insti...
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