Ismaning, Oct. 07

AIXTRON AG has just completed the purchase of a CLEANSORB dry bed absorber from CS CLEAN SYSTEMS. The single-column CS195SC model is to be installed in AIXTRON’s recently-extended applications laboratory, where it will be hooked up to a system dedicated to the in-house development and qualification of GaAs- and related processes.
CLEANSORB chemisorber safely converts high flows of up to 4 slm AsH3/PH3 to solid compounds at room temperature, and is practically maintenance-free. The expended CLEANSORB column can be returned to any CS service centre worldwide for disposal and replenishment with fresh absorber.