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CLEANSORB® Series
Dry bed abatement of process waste gas

The majority of speciality process gases used in wafer processing, solar and MEMS manufacturing are either pyrophoric, toxic, or corrosive. Safety of personnel and protection of the environment are matters of the highest priority.

The CLEANSORB waste gas abatement system removes hazardous process gases on the basis of chemical conversion (chemisorption) to stable salts at ambient temperature. No external heating, moisturisation, or other facilities are required for operation. Hence the CLEANSORB system is fully passive, and is permanently on stand-by, even in the event of a power- or other facilities failure.

CS CLEAN SYSTEMS customers worldwide avail of a local service for the collection and refilling of expended CLEANSORB columns, which are patented, UN-approved and reusable transport containers.

A wide range of CLEANSORB model sizes are available to meet the needs of all our customers- from small-scale university researchers to round-the-clock wafer fabrication.


CLEANSORB Stand Alone Series
Point of Exhaust Abatement
A stand alone column without cabinet and without monitoring unit especially designed for small R&D applications.


CLEANSORB LABLINE Series
Point of Exhaust Abatement for R & D Applications
The mini-version CLEANSORB dry bed absorber in a compact cabinet. The passively-operating LABLINE unit is permanently on ready and does not have to be started up before each new experiment is run. This makes it perfectly suitable for sporadic R&D work. Long absorbing lifetimes, often ranging into years, are typical.


CLEANSORB BASELINE Series
Point of Exhaust Abatement
The BASELINE series is based on a smart design which eliminates the needs for control electronics. It is manually operated and intended as a rugged basic model for cost-sensitive applications.


CLEANSORB SC Series
Single-Column Point of Exhaust Abatement
The standard model for both pilot- and production scale waste gas removal. Operation is simple with very little operator training necessary. Minimal facilities requirements. Practically maintenance-free.


CLEANSORB PRIMELINE-Series
Single-Column Point of Exhaust Abatement with Backup-Absorber
Model with special safety and monitoring features for MOCVD applications allowing interruption-free processing.

CLEANSORB Stand Alone Series
CLEANSORB LABLINE Series
CLEANSORB BASELINE Series
CLEANSORB FABLINE Series
CLEANSORB PRIMELINE Series