| Summenformel | Garantierte Austrittskonzentration [ppm] / [mg/m]3 |
|---|---|
| Al(C2H5)3 | quantitative Entfernung |
| Al(CH3)3 | quantitative Entfernung |
| AlH(CH3)2 | quantitative Entfernung |
| AsCl3 | 0,01 mg/m3 (As) |
| AsF3 | 0,01 mg/m3 (As) |
| AsF5 | 0,01 mg/m3 (As) |
| AsH2(C4H9) | 0,01 mg/m3 (As) |
| AsH3 | 0,005 ppm |
| B(OCH3)3 | quantitative Entfernung |
| B2H6 | 0,1 ppm |
| BBr3 | 1 ppm |
| BCl3 | 1 ppm |
| BF3 | 0.35 ppm |
| BH2NH2 | 0,1 (B2H6) |
| Br2 | 0,1 ppm |
| Cl2 | 0,5 ppm |
| ClF3 | 0,1 ppm |
| CO | 30 ppm |
| COCl2 | 0,02 ppm |
| COF2 | 1 ppm (HF) |
| Cr(CO)6 | 2 mg/m3(Cr) |
| F2 | 1 ppm |
| Ga(C2H5)3 | quantitative Entfernung |
| Ga(CH3)3 | quantitative Entfernung |
| GeCl4 | 2 ppm (HCl) |
| GeH4 | 0,2 ppm |
| H2S | 5 ppm |
| H2Se | 0,015 ppm |
| HBr | 1 ppm |
| HCl | 2 ppm |
| HF | 1 ppm |
| In(C2H5)3 | quantitative Entfernung |
| In(CH3)3 | quantitative Entfernung |
| NH3 | 20 ppm |
| Ni(CO)4 | 0,2 mg/m3 (Ni) |
| NO2 | 3 ppm |
| NO | 25 ppm |
| OP(OCH3)3 | 2 ppm |
| PBr3 | 0,5 ppm |
| PCl3 | 0,5 ppm |
| PCl5 | 1 mg/m3 |
| PH2(C4H9) | 0,1 ppm (PH3) |
| PH3 | 0,1 ppm |
| POCl3 | 0,2 ppm |
| SbH3 | 0,1 ppm |
| Si(CH3)2(OCH3)2 | 5 ppm (SiH4) |
| Si(CH3)4 | 5 ppm (SiH4) |
| Si(OC2H5)4 | 10 ppm |
| Si2Cl6 | 2 ppm (HCl) |
| Si2H6 | 5 ppm |
| SiCl4 | 2 ppm (HCl) |
| SiF4 | 1 ppm (HF) |
| SiH2(CH3)2 | 5 ppm (SiH4) |
| SiH2Cl2 | 2 ppm (HCl) |
| SiH3(CH3) | 5 ppm (SiH4) |
| SiH4 | 5 ppm |
| SiHCl3 | 2 ppm (HCl) |
| SO2 | 0,5 ppm |
| Te(C2H5)2 | 0,1 (Te) |
| TeF6 | 0,02 ppm |
| TiCl4 | 2 ppm (HCl) |
| Ti(N(CH3)2)4 | 20 ppm (NH3) |
| WF6 | 1 ppm (HF) |
| Zn(C2H5)2 | quantitative Entfernung |
Garantierte Austrittskonzentrationen von Trockenbettabsorbern CLEANSORB