In contrast to many market-available scrubber products where the scrubbing efficiency is expressed in terms of percent waste gas removal, CS CLEAN SYSTEMS guarantees absolute outlet concentrations for its dry bed absorbers - typically the TLV value for the particular process gas.

CLEANSORB technology is based on dry bed chemisorption at room temperature. Hazardous gas species are converted into stable inorganic solids. The chemisorption reaction between gas and absorbent is irreversible, ensuring that hazardous gases are bound in solid form and cannot be re-released.

Based on many years of experience as the leader in dry chemisorption technology, a wide range of proprietary absorbers are available which have been optimized for the many process gases and liquid precursors used in semiconductor front end manufacturing, in the solar and MEMS industry. Our granulates are subject to permanent quality control procedures and ongoing R&D work to keep abreast of the industry as new wafer chemistries emerge.

CLEANSORB customers enjoy a comprehensive maintenance package comprising a unique take-back and disposal service for the spent absorber material. Accordingly, process and facilities engineers need not concern themselves with the handling of hazardous process by-products, and are thereby additionally relieved of a considerable logistics burden.