The NOVAPURE® and NOVASAFE® range of dry bed absorbers is now available at CS CLEAN SYSTEMS Inc.

Please direct your inquiries to:

CS CLEAN SYSTEMS INC.
26 Commerce Drive
Danbury, CT 06810, USA
Tel.: +1 (203) 797-8155
Fax: +1 (203) 797 0414
ed.kulha@cscleansys.com

- Ion Implant, Etch & CVD
- 32 gallon or 37 gallon canisters
- Flow limit 240 slpm
- Lifetime typically > 3 years on Ion Implant
- Lifetime typically > 6 months on Etch
- Built in bypass
- Built in end point detector
- Blower option with inlet pressure control
- Disposable canisters
- No refill necessary

- Mainly for Ion Implant application
- Unit installed in tool – zero footprint
- Disposable
- Usually 6 – 12 months lifetime
- Fixed global prices
- Other applications for vent gases