One Design two applications
CS CLEAN SYSTEMS is introducing a revolutionary new UHP chemical delivery system specifically designed to meet the needs of tomorrow's materials. The key elements which guarantee safety, reliability and ease of handling have been specially developed for UHP liquids and do not rely on designs inherited from gas delivery systems.
TRICHEM Delivery Systems (TCD) guarantee a safe and fully automated supply of CVD- or ALD tools with UHP liquid chemicals. TCD chemical dispensing systems are available as either a single or dual canister cabinet. TCD cabinets are optimised for use with the TRICHEM TCC canisters but can also be run with all proprietary canister types used by major vendors of precursor materials.
Depending on the application the system can be configured:
- Constant pressure supply for direct liquid injection. The chemical is conducted with pressure to a buffer-tank, wherefrom it is delivered to the tool with highest precision.
- Automatic batch-fill mode for bubbler replenishment. Up to 12 "On-Board Bubblers" can be served.
